INS661: Nano/Micro Opto-electronic-mechanical systems

        [Cr:4, Lc:3, Tt:1, Lb:0]

Course Outline

MOEMS and NOEMS has been an exponentially growing field for the past century and has its key applications in all existing devices like cell phones, pedometers, CCDs etc. It is extensively used in sensing applications in technological applications. This course will describe synthesis and characterization of NOEMS and MOEMS for a general audience and focus on technology aspect for the same. Furthermore, it gives a hands on experience in designing and making a microfluidic channels using a laser engraver. Basic Requirement: Masters in chemistry, physics or technology with a basic understanding of materials, stress, strain and electrical circuits.

• Introduction to basics:

  Part 1: Optics: Reflection, Refraction and Diffraction,
  Part 2: Mechanics: Elasticity, structures and
  Part 3: Electronics: Capacitors, AC Circuits, Sensors and Actuators.
  

• Fabrication:

  Part 1: Substrates and Doping, Resists,
  Part 2: Thin Films Deposition methods: CVD, PVD, self-assembly Etc.
  Part 3: Lithography: E-beam, Soft Lithography Contact Lithography, Thermal Lithography, Interference lithography, etc.
  Part 4: Etching: Wet and Dry,
  Part 5: Wafer Bonding and Integration.
  

• Materials and Processes:

  Part 1: Difference in material properties and their effects on N/M-OEMS,
  Part 2: Determination of material properties,
  Part 3: Biomaterial Processing.
  

• Design Trade offs:

  Part 1: Analog Designs,
  Part 2: Mechanical Packing,
  Part 3: Optical Arrangement.
  

• Microfluidics:

  Equipment’s: Hands on training on Laser engraver, Simulating a microfluidic channel, Designing a device.

• Case Studies: Working and Applications:

  i) Commercial Accelerometers, Pedometers: Capacitive,
  ii) Bio N/M-OEMS,
  iii) Optical-MEMS.
  

Recommended Reading

• P. V. Zant, Microchip Fabrication, McGraw-Hill Education; 5 edition 2004 ISBN: 978-0071432412
• Ning Xi and King Lai, Nano Optoelectronic Sensors and Devices: Nanophotonics from Design to Manufacturing, Elsevier Inc. 2011, eBook ISBN: 9781437734720.
• J. T. Borenstein et al., Microfluidic Cell Culture Systems, 2012, eBook ISBN: 9781437734607,
• C. S. Kumar, Microfluidic Devices in nanotechnology, Wiley 2010 ISBN: 978-0-470-59069-0
• Sam Zhang, Nanostructured thin films and coatings: Mechanical Properties, CRC Press 2010 ISBN 9781420094022
• H. Baltes et al, Enanabling technology for MEMS and Nanodevices, Wiley-VCH, 2008